diX �ߴ��ȵĶ��ױ���ۺ�Ϳ����Ĥ
diX���ձ�����������ʽ����(Daisan
Kasei Co., Ltd)��������Di-p-xylylene��ƷƷ��(һ�㴿��ParyleneͿ��Ĥ)
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�����κ���״�IJ����ڳ��¶�����������ܾۺ�һ����Է�ֹ����,�߾�Ե�ȼ���Ӧ���ı���Ϳ����Ĥ������ |
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diXͿ����Ĥ������
diXͿ����Ĥ����ǿ�ĵ�������е����,
���ڷ�ˮ�ݼ���ʳ��Һ��ĵı���������Զʤͬ���Ϳ����Ĥ��
��CVD����diX����ϸС������ڱھۺϳɺ�Ⱦ�һ��Ϳ����Ĥ,
���۲�Ʒ�ж�ϸС�������жิ��, diX�����ڳ����������ڲ�Ʒ����ۺϳɼ��߽��ܶȵ�Ϳ����Ĥ�� |
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diX�����ۺϹ���
CVDװ����������¯, �ȷֽ�¯���ۺϸ������ɡ�
����¯ : ��״diXԭ�ϼ�����180oC���������塣
�ȷֽ�¯ : ����diX��������650oC, ������ӽ��м��ҵ��ȷֽ����á�
�ۺϸ� : �ȷֽ�����������ڲ�Ʒ����ۺϳ���ȵĸ߷���Ϳ����Ĥ�� |
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diX����
DAISAN KASEI��˾�ж��ֲ�ͬ���Ե�Di-p-xylylene����,
�ձ鱻���õ���diX-C��diX-N�� |
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diX-C�ķ���ʽ���ۺ���ĵ������ʽ
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diX-N�ķ���ʽ���ۺ���ĵ������ʽ
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(һ) �ߴ���
DAISAN KASEI�Զ��ص�����������diXϵ�в�Ʒ�ܴ���99%���ϵĸߴ���,
Զ���г�������ͬ���ƷΪ��!
�ߴ��ȵ��ŵ�:
(1) ����������ʹCVD�豸����ʱ����������Ĵ̱�����,
�������ȡ�
(2) CVD�豸�ڲ�������ϵ����������������������������Ҽ��ȷֽ�¯��,
�Ӷ����Ͳ�Ʒ��������Ⱦ�Ļ��ᡣ
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(��) diX-CͿ����Ĥ�Ŀ�ˮ��������
��diX�ĸߴ��������ܾۺϳ����߽��ܶȵ�Ϳ����Ĥ,
��Ĥ�Ŀ�ˮ��������Զ������ͬ��Ϳ��Ĥ�ߣ�
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��������
| �������� |
Poly-Cl-PX
(diX-C) |
Poly-PX
(diX-N) |
������֬
Epoxy |
��ͪ
Silicone |
��֬
Urethane |
| ��(N2) |
1 |
8 |
4 |
- |
80 |
| ��(O2) |
7 |
40 |
5-10 |
5 x 104 |
200 |
| ������̼(CO2) |
8 |
215 |
8 |
3 x 105 |
3 |
| ��(H2) |
110 |
540 |
110 |
4.5 x 104 |
- |
| Notes : |
Gas Unit: cm3-mil/100 in2
- 24hrs-atm (23oC)
Poly-Cl-PX : Poly-Chloro-p-xylylene
Poly-PX : Poly-p-xylylene |
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(��) �ͻ�ѧ�ܼ�, ����Һ�弰����Һ�������
���Է���: ��12.7��m���diX��Ĥ���ڲ�ͬ����Ļ�ѧҺ�岢���������
��ٷֱȡ� |
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diX-C
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diX-N
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23oC
,
90 mins.
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75oC
,
120 mins.
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23oC
,
90 mins.
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75oC
,
120 mins.
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��ѧ�ܼ�
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Isopropyl alcohol (IPA)
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0.1
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0.2
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0.3
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0.3
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Mixed Xylenes
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2.3
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3.3
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1.4
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2.1
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Monochlorobenzene
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1.5
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2.0
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1.1
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1.7
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Dichlorobenzene
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3.0
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1.4
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0.2
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0.3
|
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Trichloroethylene
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0.8
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0.9
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0.5
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0.7
|
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Freon
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0.2
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0.3
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0.2
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0.2
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2.4 Pentanedione
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1.2
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1.8
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0.6
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0.7
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Acetone
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0.9
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0.9
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0.3
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0.4
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Pyridine
|
0.5
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0.7
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0.2
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0.4
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����Һ��
|
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10% HCL
|
0
|
0
|
0
|
0
|
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37% HCL
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0
|
4.1
|
0.2
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2.3
|
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10% H2SO4
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0.3
|
0.2
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0.1
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0.2
|
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95% H2SO4
|
0.4
|
5.1
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0.2
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5.3
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10% HNO3
|
0.1
|
0.1
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0.1
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0.2
|
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71% HNO3
|
0.2
|
1.8(���)
|
0.2
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���ϸм
|
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����Һ��
|
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10% NaOH
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0
|
0.5
|
0.1
|
0
|
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10% NH4OH
|
0.2
|
0.4
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0.3
|
0.4
|
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������ҵ��Һ��
|
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Deionized Water
|
0
|
0
|
0
|
0
|
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| (��) diXͿ����Ĥ���������� |
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��������
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��λ
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diX-C
|
diX-N
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ASTM���Է���
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�ܶ�
(Density)
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g/cm3
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1.309
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1.110
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D1505
|
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������
(Refractive index)
|
1.649
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1.661
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Tensile
modulus
|
Gpa
|
3.2
|
2.4
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D882
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����ǿ��
(Tensile strength)
|
psi
|
9800
|
6800
|
D882
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Yield
strength
|
psi
|
9500
|
7250
|
D882
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�쳤��
|
�ƶ�ֵ
|
%
|
270
|
30
|
D882
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(Elongation)
|
����ֵ
|
%
|
3.5
|
2.5
|
D882
|
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��ʽӲ��
(Rockwell Hardness)
|
R80
|
R85
|
D785
|
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Ħ��ϵ��
(Coefficient
of friction)
|
��ֹ
|
|
0.29
|
0.25
|
D1895
|
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����
|
|
0.29
|
0.25
|
D1895
|
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�۵�
(Melting point)
|
oC
|
290.7
|
420
|
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������ϵ��
(Coefficient of linear expension)
|
1/oC
|
3.01 x
10-5
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6.09 x
10-5
|
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��糣��
(Dielectric
constant)
|
60 Hz
|
|
3.10
|
2.65
|
D150
|
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1K Hz
|
|
2.83
|
2.65
|
D150
|
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����������ֵ
(Dissipation
factor)
|
60 Hz
|
|
0.027
|
0.0002
|
D150
|
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1K Hz
|
|
0.015
|
0.0002
|
D150
|
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�յ�ǿ��
(dielectric strength)
|
V/mil
|
6900
|
7000
|
D149
|
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�������
(Volume resistivity) at 23oC,
50%RH
|
��·cm
|
6.9 x 1016
|
1.4 x 1017
|
D257
|
|
�������
(Surface resistivity) at 23oC,
50%RH
|
��
|
2.2 x 1015
|
1.0 x 1013
|
D257
|
|
��ˮ�� (water absorption) 24 hrs
|
%
|
< 0.1
|
< 0.1
|
D570
|
|
ˮ�������� (Moisture vapor transmission)
(g-mil/1000in2 - 24hrs, 37oC,
90%RH)
|
0.016
|
1.6
|
D570
|
Notes: 1 mil = 1/1000 inch = 25.4 microns
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����ʹ�õ�����¶�
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һ�����
|
û����������
|
|
diX-C
|
120 - 130 oC
|
260 oC
|
|
diX-N
|
100 - 110 oC
|
240 oC
|
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��;
�������� (MnZn and NiZn ferrite
core)
�ս��������ʯ (Sinter Neodymium Rare Earth Magnet)
���ܶ���·�� (High density assembled PCB)
ҽ���õ��ܼ����� (Medical Katheter, O-ring and equipment)
��Ӧ�� (Sensors)
���� (Rubber parts) |
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��ջ�ѧ�����ۺϷ���(Chemical
Vapor Deposition)
DACSϵ����Ϊ����Ӧ��diX�����Զ���Ƶ��Զ���CVD�����豸��
��Ҫ�豸�ص㼰���۷���:
- ��ȫ��Ϳ���������
- 10���Զ���ѹ�����¶����س�ʽ�趨
- ѹ�����¶ȵ����Զ��պϻ�·����
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DACS-0050H/0025H��ֱ��
������п, ��п����, �ս����������ܴ�ʯ�Ȳ�Ʒ��
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DACS-0600V������
���ڸ��ܶ���·��, ҽ���õ��ܺͻ���, ��Ӧ���������ȡ�
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���۴� : �����ƣ���ۣ�����˾
������Ա : ������
�绰 : (852) 2311 8377
���� : (852) 2366 0651
�ֻ� : (852) 9408 3285
e-mail : enochk@kisco-cn.com |
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